http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006339487-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-183 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-026 |
| filingDate | 2005-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b74df48daf02de95b45b468008ce965d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4055feb155740d681f7e729b69609dfd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98a05826593836d8a19f0e366cafd4b4 |
| publicationDate | 2006-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006339487-A |
| titleOfInvention | Optical element manufacturing method and patterning method |
| abstract | PROBLEM TO BE SOLVED: To provide an optical element manufacturing method and a patterning method capable of improving the reliability of an optical element. A method of manufacturing an optical element according to the present invention is a method of manufacturing an optical element 100 including a light emitting element 140 and a rectifying element 120 connected in parallel with the light emitting element. A step of laminating the first semiconductor layer 105, the second semiconductor layer 111, and the third semiconductor layer 112 disposed above from the substrate side; and (b) at least a part of the second semiconductor layer and the third semiconductor. Patterning the layer into a first shape; and (c) wet etching using an etchant having a higher selectivity than the material of the second semiconductor layer than the material of the first semiconductor layer and the third semiconductor layer. A step of etching the second semiconductor layer; and (d) a step of covering the first semiconductor layer, the second semiconductor layer, and the third semiconductor layer with a portion inside the first shape. Patterning into two shapes. [Selection] Figure 7 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7643531-B2 |
| priorityDate | 2005-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327157 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098968 |
Total number of triples: 16.