| abstract |
PROBLEM TO BE SOLVED: To realize a probing system capable of efficiently measuring a one-chip semiconductor device that requires high-precision positioning. A probing system for connecting a terminal of each tester to an electrode of a semiconductor device in order to inspect the semiconductor device 100 of one chip with a plurality of testers, and a plurality of measurement stations 1A- 1C, load unit 5 for supplying semiconductor device, unload unit 6, and chip transport mechanism 1A-1D for semiconductor device, each measurement station electrically connects the electrode of the semiconductor device to the terminal of the tester And a chuck stage 21 that holds a one-chip semiconductor device, and a moving rotation mechanism 22-31 that moves and rotates the chuck stage. The semiconductor device is sequentially inspected at each of a plurality of measurement stations. [Selection] Figure 1 |