http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006313899-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14643 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14689 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146 |
| filingDate | 2006-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d59d756b717b2fe49bc57d53e89022ec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b8322d074fe77e5e6411a9528f8d64f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e5a88941b028d550cd7a0082fcb8b91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e813ea571885dcc9977597fbc4f03119 |
| publicationDate | 2006-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006313899-A |
| titleOfInvention | Image sensor and manufacturing method thereof |
| abstract | An image sensor and a CMOS image sensor in which the occurrence of random noise is sufficiently reduced are provided. An image sensor includes a photodiode formed downward from a substrate surface in a plate thickness direction, and a gate structure formed on a surface side of the substrate on which the photodiode is formed. The gate structure includes a gate insulating film made of an oxide not containing nitrogen and a gate conductive film formed on the gate insulating film. A nitride region is formed on the surface of the gate insulating film in contact with the gate conductive film. Therefore, the random noise characteristic of the image sensor and the threshold voltage characteristic due to the boron penetration phenomenon can be easily improved. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10490582-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017118121-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10103186-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8106984-B2 |
| priorityDate | 2005-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 83.