http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006303339-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2005-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84f87b9f193835411898eb9ca380d37e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98a5655f9d3dad1894493a2b3dc75374 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f7979410d33e310f0f9b58eca4d4bbb |
| publicationDate | 2006-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006303339-A |
| titleOfInvention | Workpiece holder and wafer prober mounted therewith |
| abstract | To provide a workpiece holder having a high rigidity, a low cost and a simple structure. In addition, a wafer prober apparatus on which the object holder is mounted is provided. A processing object holding body 1 having a mounting surface 2 for mounting a processing object by vacuum suction, the mounting surface 2 of the holding body 1 and a surface 3 on the opposite side thereof. And a recess 5 is formed on the side surface 3 opposite to the mounting surface 2 of the workpiece holder 1, and a covering member 6 that covers the recess 5 is provided. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010098056-A |
| priorityDate | 2005-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.