| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc45703f67bc72a6db582867886fd5d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36eb00a5c4946507dd04f3fd4bbd3fbb |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 |
| filingDate |
2005-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_801ef042f30a0e0bb068432e7db76a28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62c4e498c3e7462ba4c1bbdd2673555b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65cde2b2b55648e5021fb92496946614
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c14e042ef590bb289aeab1bf57a6ed92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b978df6da7435806523789eb568d751 |
| publicationDate |
2006-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006274327-A |
| titleOfInvention |
Method for producing clathrate compound thin film |
| abstract |
PROBLEM TO BE SOLVED: To provide a method for easily and efficiently producing a film made of a clathrate compound having good properties on an arbitrary substrate without causing a film formation sample to be damaged by plasma. A method for producing a clathrate compound thin film having a crystal structure of a cage-like molecular aggregate on a substrate 16, wherein a target 20 is sputtered by helicon excitation sputtering, and the clathrate compound thin film is formed on the substrate 16. A method for producing a clathrate compound thin film characterized by comprising: [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016156041-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014043599-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106153690-A |
| priorityDate |
2005-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |