http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006270086-A

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filingDate 2006-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c34f5dae0e27cbfc25daf7586b562f81
publicationDate 2006-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2006270086-A
titleOfInvention Processing method of composite green sheet
abstract 【Task】 A through hole is formed in the composite green sheet composed of the conductor layer and the green sheet so that no residue is left during processing. [Solution] A step of preparing a composite green sheet in which a conductor layer is formed on a green sheet having an inorganic powder and an organic binder, a step of arranging the composite green sheet on a support surface of a base material containing a liquid, and the composite green sheet A through hole that penetrates the conductor layer by irradiating a laser beam on the substrate and forming a through hole as necessary, and evaporating the liquid contained in the base material to clean and remove residues on the inner wall surface of the through hole Exposing the conductor layer to the inner wall of the green sheet. [Selection] Figure 2
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102157254-A
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