| abstract |
An object of the present invention is to provide a photosensitive polyimide resin composition capable of obtaining a high-sensitivity and high-contrast pattern and excellent in electrical characteristics of a cured coating film. In a photosensitive polyimide resin composition comprising a polyimide precursor formed from a carboxylic dianhydride and a diamine, and a diazonaphthoquinone compound, 5,5 ′ is used as the carboxylic dianhydride. -(1,1,3,3-Tetramethyl-1,3-disiloxanediyl) -bis-norbornene-2,3-dicarboxylic dianhydride is used. [Selection figure] None |