http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006261629-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
filingDate | 2005-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c37a8e1d2c7d3335d3d2854c8a8d564 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d5c11a3d1f34c70d652adfe407b0655 |
publicationDate | 2006-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2006261629-A |
titleOfInvention | Pattern formation method |
abstract | PROBLEM TO BE SOLVED: To provide a pattern forming method capable of forming a permanent pattern such as a wiring pattern with high definition and efficiency by suppressing distortion of an image formed on the pattern forming material. SOLUTION: The photosensitive layer has a photosensitive layer, and the photosensitive layer includes a binder, a polymerizable compound, a photopolymerization initiator, an elastomer, and a thermal crosslinking agent. An aspherical surface capable of correcting aberrations due to distortion of the exit surface in the picture element part after modulating the light from the light irradiating means by an optical modulation means having n picture element parts for receiving and emitting light from The pattern forming method includes at least performing exposure through a microlens array in which microlenses having the structure are arranged. The aspheric surface is preferably a toric surface. [Selection] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008050835-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8815472-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011215392-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018533841-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10645814-B2 |
priorityDate | 2005-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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