http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006261294-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1e0fc105cdaa6fc6208bcc48eadab50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2005-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_783ea012c10fe36942d571cc6aca9670 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_237ec4e37d6493a673b70aaef0d6bb75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_837c9440d39b1f391f9c20636d97d50e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc38516e83239e24e99be1287bc68f65 |
| publicationDate | 2006-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006261294-A |
| titleOfInvention | Discharge extreme ultraviolet light emitting device |
| abstract | PROBLEM TO BE SOLVED: To stabilize the EUV output by keeping the supply flow rate of SnH 4 gas from a liquefied monostannane container to a plasma generation unit constant. SOLUTION: A flow meter 14 is provided in a pipe 4 and the flow rate of SnH 4 gas supplied to a plasma generator 3 is measured by the flow meter 14. The output signal of the flow meter 14 is input to the control unit 15, the opening degree of the valve 10 is adjusted by the control unit 15, and the flow rate of the gas 8 flowing through the gas pipe 9 wound around the liquefied monostanan container 1 is adjusted. When the liquefied SnH 4 2 evaporates in the liquefied monostanan container 1, the heat of vaporization is taken away. However, with the above configuration, the temperature of the liquefied SnH 4 2 is adjusted, and the supply amount of SnH 4 gas to the plasma generation unit 3. Can be controlled to be constant. Further, instead of providing the flow meter 14, a gas pressure gauge for detecting the gas pressure in the liquefied monostanan container 1 is provided to control the gas pressure in the liquefied monostanan container 1 to supply SnH 4 gas to the plasma generation unit 3. The amount may be constant. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008047426-A |
| priorityDate | 2005-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578766 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123161 |
Total number of triples: 19.