http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006261267-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2005-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f20bc89b2b390f4980fdc60ebb339cfd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5af891c4b71083d89027f3b6d804d7db |
| publicationDate | 2006-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006261267-A |
| titleOfInvention | Inspection apparatus and inspection method, integrated circuit element manufacturing method, integrated circuit element |
| abstract | PROBLEM TO BE SOLVED: To provide a probe card necessary for inspection of one IC chip in one probe card so that a plurality of patterns can be measured. SOLUTION: A mounting table for placing an object to be inspected, a driving mechanism for moving the mounting table in the vertical and horizontal directions, and a plurality of probe needles arranged to face the mounting table, are mounted by the driving mechanism. By moving the mounting table, the probe needle is brought into contact with a plurality of electrodes of the inspection object placed on the mounting table, and the inspection object is inspected. Each electrode of the inspection object corresponds to each electrode. And at least one relative distance from the contact portion of the probe needle. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013089060-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016171353-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009016745-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015105834-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013123009-A |
| priorityDate | 2005-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.