abstract |
PROBLEM TO BE SOLVED: To provide a method for modifying a magnesium oxide thin film formed by a coating method so that it can be advantageously used as a protective film for a dielectric layer of an AC plasma display panel. A method for modifying a magnesium oxide thin film comprising heating the magnesium oxide thin film to a temperature of 100 to 1200 ° C. in a reducing gas atmosphere, or under a reduced pressure of 10 Pa or less or under a reduced pressure plasma atmosphere. . [Selection figure] None |