http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006253575-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-287 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4676 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3121 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate | 2005-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92c31834d8f2cf218af417d89647356b |
| publicationDate | 2006-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006253575-A |
| titleOfInvention | Insulating film, method of manufacturing the same, and electronic device using the same |
| abstract | PROBLEM TO BE SOLVED: To provide a method for manufacturing an insulating film, in particular, an insulating film capable of forming an insulating film having a low dielectric constant and a small change in relative dielectric constant with time used for an electronic device and an electronic device having the same. . An insulating film is formed by applying a film-forming composition containing a compound having a cage structure and drying by heating, and is irradiated with light having a wavelength of 200 nm or less during and / or after drying. An insulating film, a method for manufacturing the insulating film, and an electronic device having the insulating film. [Selection figure] None |
| priorityDate | 2005-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 88.