| abstract |
An elastomer valve structure that can be thinned and operates with a small force and that is relatively easy to manufacture as compared with a silicon substrate process, and a pumping system using the same are provided. A second flow channel 32 is formed in the elastomer block so as to be laminated perpendicularly to the first flow channel 30. The membrane 25 forming the top of the first flow channel 30 separates the two flow channels and forms the bottom of the second flow channel 32 as well as the top of the first flow channel 30. By varying the pressure in the second flow channel 32, the membrane 25 repeatedly deflects and returns downward, so that the first flow channel 30 constitutes a linear valve operating system. [Selection] Figure 7B |