| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E04B9-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A62C35-62 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08 |
| filingDate |
2006-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d352978bcd5077268ace6d2b84123ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25b889114b1704e306d4f91543b9c677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e152e29c92e345594e55fce1c55f660d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_421de8a7ac25307ee1b7ecb7b512306a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e6b7930173cdc1d777bd55236237608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1b92dfeb4fa99795b126a23255ee7ca |
| publicationDate |
2006-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006247650-A |
| titleOfInvention |
How to remove residues from the chamber |
| abstract |
There is currently no effective method for cleaning permeable windows under reduced pressure in situ after UV annealing of porogen and organosilicate composite films. A method for removing residue from a surface is disclosed. In one aspect, the method includes providing a chamber including a residue-coated surface, supplying an oxidizing gas and a cleaning composition of any organic species into the chamber, and cleaning the cleaning composition with ultraviolet light. Irradiating with light to remove residues from the surface. For example, the surface can be a window of a process chamber. In certain aspects, a reflective surface may be placed in close proximity to the window to increase cleaning efficiency. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013194307-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011009218-A |
| priorityDate |
2005-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |