http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006234826-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 |
| filingDate | 2006-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78ea0951a50c518406bf4bef4bd6e4b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_346643f4b2653f636b9da240c5193618 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_229fdfa766d6365a3be06b87b7224ae0 |
| publicationDate | 2006-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006234826-A |
| titleOfInvention | Sheet-like probe, probe card, and wafer inspection method |
| abstract | [PROBLEMS] To ensure positional displacement between an electrode structure and an electrode to be inspected due to a temperature change in a burn-in test even if the inspection object is a large area wafer having a diameter of 8 inches or more or a circuit device having a very small pitch of the electrode to be inspected. Provided is a sheet-like probe that can be prevented. An insulating layer, and a contact film including a plurality of electrode structures that are spaced apart from each other in the surface direction of the insulating layer and extend through the insulating layer in the thickness direction, the electrode Each of the structures is exposed from the surface of the insulating layer and further protrudes from the surface of the insulating layer, a back electrode portion exposed from the back surface of the insulating layer, and a base end of the surface electrode portion Continuously extending through the insulating layer in the thickness direction, and comprising a short-circuit portion connected to the back electrode portion, the diameter of the upper end portion of the short-circuit portion and the base end portion of the surface electrode portion is Shoulder portions are provided differently, and the contact film is supported by the peripheral edge portion of the through hole of the metal frame plate in which the through hole is formed. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102589226-B1 |
| priorityDate | 2004-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.