http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006222299-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B5-117 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-28 |
| filingDate | 2005-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cb3d36ef24bed3c16d0248c9664969f |
| publicationDate | 2006-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006222299-A |
| titleOfInvention | Wiring structure and manufacturing method thereof |
| abstract | An object of the present invention is to provide a wiring structure capable of reducing the contact resistance when contacting the wiring surface and a method for manufacturing the same. A step of forming a conductive film made of an oxidation-resistant metal or a nitride thereof, a step of removing a natural oxide film on the conductive film, and a step of forming a conductive oxide film on the conductive film And the process of processing the conductive film and the conductive oxide film into the same pattern using the same mask to solve the above-mentioned problem. [Selection] Figure 1 |
| priorityDate | 2005-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.