http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006222113-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-02
filingDate 2005-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8764f0a650b24826328da0dd8e70ca32
publicationDate 2006-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2006222113-A
titleOfInvention Nonlinear element, electro-optical device, and method of manufacturing nonlinear element
abstract PROBLEM TO BE SOLVED: To provide a non-linear element capable of improving electrical characteristics and reliability without complicating a manufacturing process, an electro-optical device provided with the non-linear element as a pixel switching element, and a method for manufacturing the non-linear element To provide. A nonlinear element includes a lower electrode made of tantalum or the like, an oxide film formed by anodizing the surface of the lower electrode, and an upper electrode facing the lower electrode via the oxide film. have. The lower electrode 13 includes an oxygen-free layer 132 containing no oxygen on the lower layer side, an oxygen content gradient increasing layer 133 in which the oxygen content rate continuously increases toward the upper layer side, and an uppermost layer 131 containing oxygen. I have. [Selection] Figure 11
priorityDate 2005-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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