http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006210542-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2005-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d4ed423cd88d6f004aed016ba0aed07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c26f78710acf84023fb4c2016b1f027 |
| publicationDate | 2006-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006210542-A |
| titleOfInvention | Method for manufacturing and recycling liquid for immersion exposure |
| abstract | PROBLEM TO BE SOLVED: To provide excellent refractive index and transparency in the far ultraviolet region, and small variations in purity between production lots. When used as an immersion exposure liquid, it has excellent sensitivity, resolution, pattern shape, and lot-to-lot. A pattern with small exposure variation (reproducibility) is formed. A liquid immersion exposure liquid used for an immersion exposure apparatus or an immersion exposure method for exposing via a liquid filled between a lens and a substrate of a projection optical system, the liquid The method includes a step of containing a hydrocarbon compound as a raw material for the immersion exposure liquid in a container and a step of washing the hydrocarbon compound with sulfuric acid, and a step of performing distillation purification after the step of washing with sulfuric acid. [Selection] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4616884-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4934043-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100936564-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007026573-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2006115268-A1 |
| priorityDate | 2005-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.