http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006208733-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F290-06 |
filingDate | 2005-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e4a1bdb98fe8c4d168626d6e6299ce5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_897e2b6876386ba564a36f6a1c58c907 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_665afa016a6ca2f280599408e65045a1 |
publicationDate | 2006-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2006208733-A |
titleOfInvention | Pattern forming material, pattern forming apparatus and pattern forming method |
abstract | PROBLEM TO BE SOLVED: To provide a pattern forming material having good scratch resistance in a developing solution, excellent in resolution and tent properties, excellent in developability, and capable of forming an accurate pattern without variation in line width, chipping or disconnection, And a pattern forming apparatus including the pattern forming material and a pattern forming method using the pattern forming material. SOLUTION: At least a photosensitive layer is provided on a support, and the photosensitive layer contains at least a binder, a polymerizable compound, and a photopolymerization initiator, and the I / O value of the binder is 0. The pattern forming material is characterized in that it is 35 to 0.65, and the polymerizable compound contains a compound having three or more polymerizable groups in the molecule. An embodiment in which the polymerizable compound includes a compound having three or more polymerizable groups and a polyalkylene oxide group in the molecule is preferable. [Selection] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007032246-A1 |
priorityDate | 2005-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 946.