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publicationDate 2006-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2006208240-A
titleOfInvention Optical measurement substrate and method of manufacturing the substrate
abstract PROBLEM TO BE SOLVED: To provide a substrate suitable for optical measurement which adheres and holds a minute amount of a specific substance in a minute region with high density and good reproducibility. Etching is performed by applying a masking pattern on a substrate using a material having a slightly weak adhesion to the substrate. Since the adhesive force between the mask and the substrate is weak, the mask 4 is peeled off from the substrate surface, and a gap 5 is formed between the mask 4 and the substrate 1 to perform anisotropic etching. According to such a method, it is possible to easily produce an optical measurement substrate having a concave shape whose cross-sectional shape can be approximated by a curve having an inflection point, and the measurement light is incident from a lower angle than 45 degrees obliquely. However, there is no loss of incident light and reflected light, and the optical characteristics of a very small amount of substance can be efficiently evaluated. [Selection] Figure 1
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