http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006208166-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| filingDate | 2005-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb8e5ee8e9b9646db9a6b217e2071355 |
| publicationDate | 2006-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006208166-A |
| titleOfInvention | Contact probe, method of using the same, probe card including the contact probe, and inspection apparatus |
| abstract | PROBLEM TO BE SOLVED: To provide a contact probe which is less likely to be damaged even in a device having a brittle dielectric structure immediately below an electrode. A contact probe according to the present invention includes a tip portion that contacts a surface to be measured, a support portion that performs support and electrical connection, and a spring portion that connects the tip portion to the support portion. The portion and the spring portion are displaced on the surface to be measured while the tip portion is in contact with the surface to be measured by elastic deformation generated in the spring portion when the support portion is fixed and the tip portion is pressed against the surface to be measured. The tip portion is a rotating body having a rotation axis whose shape is oriented toward the surface to be measured, and the tip portion further includes a contact corner portion that directly contacts the surface to be measured at the tip. The contact corner portion has a roundness with a radius of curvature R of 3 μm or more and 50 μm or less, and a pressure when pressed against the surface to be measured is 0.1 GPa or more and 5 GPa or less. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012112680-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015049076-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9625492-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101034325-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012067161-A1 |
| priorityDate | 2005-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559532 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24404 |
Total number of triples: 19.