http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006203060-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate | 2005-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bad9357e3e7579904cee788becdc26f8 |
publicationDate | 2006-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2006203060-A |
titleOfInvention | Surface hydrophobization method, semiconductor device and method for manufacturing the same |
abstract | PROBLEM TO BE SOLVED: To provide a surface hydrophobization method having consistency with a subsequent processing process, capable of hydrophobizing a surface of a layer more easily and efficiently, and capable of hydrophobizing a deeper region of the layer And a semiconductor device and a manufacturing method thereof. The surface hydrophobization method of the present invention comprises a step of contacting a surface hydrophobizing composition containing (A) a reactive silane compound and (B) an organic solvent with the surface of the layer; Activating the silane compound and heating the layer. The semiconductor device of the present invention includes a hydrophobic film obtained by the surface hydrophobization method of the present invention. The manufacturing method of a semiconductor device of the present invention includes a step of forming a hydrophobic film by the surface hydrophobizing method of the present invention. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015088666-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9966463-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9660065-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007254594-A |
priorityDate | 2005-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 303.