http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006196592-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56 |
| filingDate | 2005-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9c47f5a61e9bb27bb494a0c2601fd51 |
| publicationDate | 2006-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006196592-A |
| titleOfInvention | Inspection method for resin-encapsulated semiconductor device |
| abstract | There is provided a method for inspecting a resin-encapsulated semiconductor device in which a chip sandwiched between a plurality of chips can be taken out in a state where electrical analysis can be performed without damaging the chip. The surface of the electronic component package is polished with a polishing paper or the like until the electronic element 3 above the electronic element to be analyzed is exposed. In this state, hydrofluoric acid and nitric acid are in a 3 to 1 ratio. The exposed electronic element 3 is dissolved and removed using a hydrofluoric acid etching solution mixed in a ratio or a potassium hydroxide aqueous solution. Thereafter, the whole is immersed in a fuming nitric acid etching solution heated to around 70 ° C. for about 10 minutes, and the electronic element protection resin 6, the resin internal wire wiring 4, and the chip adhesive tape 7 are removed. Thereafter, ultrasonic water washing is performed to expose the clean surface of the surface of the electronic element 3 sandwiched between the plurality of chips so that electrical analysis can be performed. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114420602-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105301475-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114420602-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016063194-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105723502-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016046995-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111370340-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103940831-A |
| priorityDate | 2005-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.