| abstract |
PROBLEM TO BE SOLVED: To provide a protective sheet for laser processing capable of effectively suppressing contamination of a surface of a workpiece by a decomposed material and increasing processing accuracy when processing the workpiece by light absorption ablation of laser light. It aims at providing the manufacturing method of the used laser processing goods. Moreover, it aims at providing the protective sheet for laser processing used for the manufacturing method of the said laser processed product. SOLUTION: The substrate has at least an adhesive layer, and the extinction coefficient ratio (absorption coefficient at a wavelength of 532 nm of a protective sheet for laser processing / absorption coefficient at a wavelength of 532 nm of a workpiece to be used) is 1 or more. Using a certain protective sheet for laser processing, a step of applying an adhesive layer of the protective sheet for laser processing to the laser light incident surface side of the workpiece, a protective sheet for laser processing and processing by irradiating laser light A method for producing a laser-processed product, comprising: a step of processing an article; and a step of peeling a protective sheet for laser processing from a workpiece after processing. [Selection] Figure 1 |