http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006184324-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-32 |
| filingDate | 2004-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87307bcef7e54f657d169379e61a4304 |
| publicationDate | 2006-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006184324-A |
| titleOfInvention | Pattern forming material, pattern forming apparatus and pattern forming method |
| abstract | [PROBLEMS] To provide excellent film strength and adhesion to a substrate such as a substrate for forming printed wiring, and does not peel off in a developing solution at the time of pattern formation. A pattern forming material capable of efficiently forming a pattern, a pattern forming apparatus provided with the pattern forming material, and a pattern forming method using the pattern forming material. In a pattern forming material having at least a photosensitive layer on a support, the photosensitive layer containing at least (A) a binder, (B) a polymerizable compound, and (C) a photopolymerization initiator. A pattern forming material in which A) is stable in a weak alkaline developer having a pH of 8 to 11 and decomposes in a strong alkaline stripper having a pH of 12 to 14. A pattern forming apparatus comprising at least light modulating means for exposing the photosensitive layer in the pattern forming material. And a pattern forming method using the same. [Selection] Figure 1 |
| priorityDate | 2004-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 1054.