http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006178327-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-00 |
| filingDate | 2004-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62d8ea4aec39b4e6778b231a17f388b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73ee01f59eda4f303e0c9012e97c98a5 |
| publicationDate | 2006-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006178327-A |
| titleOfInvention | Optical element, method for manufacturing the same, and projection exposure apparatus |
| abstract | [Object] To provide a high-performance immersion type lens system that can be used stably for a long period of time while avoiding erosion of the projection lens, and a projection exposure apparatus including the same. [Structure] The surface of the main body member 44a is a polished polishing surface PS, and a thin dissolution preventing film PF having a very low solubility with respect to immersion of pure water or the like is formed on the polishing surface PS. As a result, the resistance of the side surface 43d to the immersion liquid can be increased, and the optical characteristics of the optical element 43 can be maintained high by a low stress. In addition, since the tip of the optical element 43 is protected by the dissolution preventing film PF, it is possible to prevent fluorite, barium fluoride, and the like from being eroded by the immersion liquid IL such as pure water, so that fluorite, barium fluoride, etc. It is possible to prevent the dissolved components from adhering to and permeating the surface of the wafer W to have a fatal effect on semiconductor manufacturing. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010503223-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4514225-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8279402-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7916273-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007142013-A |
| priorityDate | 2004-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.