http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006173277-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-09 |
filingDate | 2004-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f049358f2240179814bb0a894f5a11a7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_629b4fc09ce39ab167a9cb0085c9e887 |
publicationDate | 2006-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2006173277-A |
titleOfInvention | Manufacturing method of conductive fine pattern |
abstract | PROBLEM TO BE SOLVED: To provide a method for producing a conductive fine pattern capable of easily and accurately obtaining a fine wiring pattern having a wiring width and a wiring interval of 0.2 μm or more and 10 μm or less with good accuracy and reproducibility. A heat extinguishing composition comprising a heat extinguishing material mainly composed of a thermoplastic resin and conductive metal nanoparticles is applied to a mold on which a predetermined fine pattern is formed, and the heat extinguishing composition layer is applied. The step of transferring the heat extinguishing composition layer according to the fine pattern by the reversal imprint method and the step of transferring the heat extinguishing material by heating to remove the heat extinguishing material and forming the conductive fine pattern on the substrate A process for producing a conductive fine pattern, comprising the step of forming. [Selection] Figure 2 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8053164-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009170907-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7985694-B2 |
priorityDate | 2004-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 419.