http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006173235-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2004-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ae27860c71559d83bcc45f7d3b66dd2 |
| publicationDate | 2006-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006173235-A |
| titleOfInvention | Insulating layer forming method, heat treatment apparatus, and storage medium |
| abstract | An insulating layer forming method capable of improving the throughput and further reducing the relative permittivity is provided. In a method of forming an insulating layer 88 in which minute pores 86 are dispersed on the surface of an object to be processed W, a single amount in which a hole forming material 84 is dispersed on the surface of the object to be processed. A coating film forming step of forming a coating film 82 containing a body or / and a low molecular weight organic compound, and a temperature within a first temperature zone in a processing container in which a plurality of objects to be processed can be heated vertically. A partial skeleton formation step of partially polymerizing the monomer or / and the low molecular weight organic compound to form a skeleton by heating for a predetermined time, and subsequently, in the processing vessel Holes for forming the insulating layer by heating the treatment body to a temperature in the second temperature band higher than the first temperature band and maintaining the treatment body for a predetermined time to vaporize the hole forming material and generate holes. Forming step. [Selection] Figure 4 |
| priorityDate | 2004-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.