http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006170911-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2004-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f55eb68f9d39c7d373e24bc08f22bc3 |
| publicationDate | 2006-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006170911-A |
| titleOfInvention | Optical element and projection exposure apparatus using the same |
| abstract | 【Task】 To provide an optical element that exhibits good reflection characteristics over a long period of time when used under extreme ultraviolet light. [Solution] A lower layer 31 that functions as a diffusion prevention layer is provided between the oxidation-resistant metal of the upper layer 32 and the surface layer of the multilayer film 20. The lower layer 31 contains MoSi 2 as a main component, and this MoSi 2 becomes a dense blocking layer, and an oxidation-resistant metal such as ruthenium, rhodium, platinum, and gold constituting the upper layer 32 is formed. The diffusion to the surface layer of the multilayer film 20 is effectively prevented. Thus, the lower layer 31 containing MoSi 2 as a main component also has a function of preventing moisture and oxygen that have passed through the upper layer 32 from entering the multilayer film 20 and is excellent in terms of oxidation resistance. It has become. That is, in cooperation with the upper layer 32, the lower layer 31 can more reliably prevent moisture and oxygen from entering the multilayer film 20 while suppressing deterioration of the reflection characteristics. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11614572-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8580465-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2011071123-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2011068223-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5673555-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011068223-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019077736-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8927179-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8993201-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011071126-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011071123-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5699938-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5696666-B2 |
| priorityDate | 2004-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 60.