http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006162605-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2005-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78ea0951a50c518406bf4bef4bd6e4b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_229fdfa766d6365a3be06b87b7224ae0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_346643f4b2653f636b9da240c5193618 |
| publicationDate | 2006-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006162605-A |
| titleOfInvention | Sheet-like probe, probe card, and wafer inspection method |
| abstract | Displacement between an electrode structure and an electrode to be inspected due to a temperature change in a burn-in test even if the object to be inspected is a large area wafer having a diameter of 8 inches or more or a circuit device having a very small pitch of the electrode to be inspected Thus, it is possible to provide a sheet-like probe that can reliably prevent the occurrence of the problem and stably maintain a good electrical connection state. An insulating layer and a contact film including a plurality of electrode structures that are spaced apart from each other in the surface direction of the insulating layer and extend through the thickness direction of the insulating layer. The surface electrode portion exposed on the surface of the insulating layer and protruding from the surface of the insulating layer, the back surface electrode portion exposed on the back surface of the insulating layer, and the thickness direction of the insulating layer continuously from the base end of the surface electrode portion And a short-circuit portion connected to the back electrode portion, a shoulder portion is provided so that the upper end portion of the short-circuit portion and the base end portion of the front-surface electrode portion are different, and the contact film penetrates It is a sheet-like probe supported by the peripheral part of the through-hole of the metal frame board in which the hole was formed, Comprising: A metal frame board and a back surface electrode part are comprised from the different metal member. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011035359-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102036105-B1 |
| priorityDate | 2004-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.