Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-265 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-44 |
filingDate |
2005-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dab98caf681a8efbfcfc9237c2dfb954 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1cc31e09312207cd543c008520069b6a |
publicationDate |
2006-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2006152303-A |
titleOfInvention |
Compositions and methods for removing residues |
abstract |
The present invention relates to a composition for removing residues such as photoresist and processing residues from a substrate, and the residues that are also exposed to the composition without undesirably corroding the metal. To provide a composition and method capable of selectively removing objects. The composition of the present invention comprises an organic amine, an optional organic solvent, and at least about 0.5% by weight of tannic acid or a salt thereof, or both. The method of the present invention includes contacting a substrate having a residue with the composition of the present invention. [Selection figure] None |
priorityDate |
2004-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |