| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-005 |
| filingDate |
2004-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7da3d7d39f0a437952b9061ad7873188
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fa76df742afebeea1d0e5df1dac759f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2f73ad2f769df92c8ddabb5df2f5491 |
| publicationDate |
2006-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006147773-A |
| titleOfInvention |
Polishing apparatus and polishing method |
| abstract |
PROBLEM TO BE SOLVED: To provide a polishing apparatus capable of supplying a polishing liquid uniformly and efficiently to a surface to be polished of an object to be polished. A polishing apparatus includes a polishing table 22 having a polishing surface 52 and a top ring 24 that holds a semiconductor wafer W and presses the semiconductor wafer W against the polishing surface 52. The polishing apparatus also supplies a polishing liquid supply port 57 for supplying the polishing liquid Q to the polishing surface 52 and the polishing liquid Q uniformly spreads over the entire surface of the semiconductor wafer W by relative movement between the semiconductor wafer W and the polishing surface 52. And a moving mechanism for moving the polishing liquid supply port 57. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7753761-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008068389-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8360817-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7083722-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011530422-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8043140-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102175562-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150101958-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014103215-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014103213-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015061739-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008188762-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101598548-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230008609-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100109866-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020024996-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010247258-A |
| priorityDate |
2004-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |