| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2005-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f88a2a0e0b5ff35fce3e7fb6f7f589b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5391c6d9c5088d8e6f5c197ba9c0844
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22e3cb9fa5858a464d24bbd5a630ca69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1361ef08b39a4dcbc96ab8c209b73a61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5691f2d6cf6c3b753f88b89442cac03 |
| publicationDate |
2006-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006140471-A |
| titleOfInvention |
Etching solution for removing low dielectric constant dielectric film and low dielectric constant dielectric film etching method using the same |
| abstract |
An etching solution for removing a low dielectric constant dielectric film and a low dielectric constant dielectric film etching method using the same are provided. An etching solution for etching a dielectric film having a low dielectric constant according to the present invention includes an oxidizing agent for oxidizing the dielectric film having a low dielectric constant and an oxide etching agent for removing the oxide. Can be used to easily remove the dielectric film having a low dielectric constant in one step. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013133668-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101367729-B1 |
| priorityDate |
2004-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |