http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006135133-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf334efdc57a817d413aef1d9f5e9d80 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-40 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-0011 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-40 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-323 |
filingDate | 2004-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4efc27ab103f1df764575843f65ae96c |
publicationDate | 2006-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2006135133-A |
titleOfInvention | Laser processing method of gallium nitride substrate |
abstract | PROBLEM TO BE SOLVED: To provide a laser processing method of a gallium nitride substrate capable of forming a desired dividing groove along a predetermined dividing line for dividing a device formed on the gallium nitride substrate. A laser processing method of a gallium nitride substrate that forms a dividing groove along a dividing line that divides a device formed on the gallium nitride substrate, and divides the device formed on the gallium nitride substrate. A pulse laser beam having a wavelength of 200 to 365 nm is irradiated along the line. [Selection] Figure 7 |
priorityDate | 2004-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.