| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-09909
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-09727
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-00 |
| filingDate |
2004-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_599631ad2f14dcd02f2772d66063f1fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4e0b582c2ca1b474260dbf741582873 |
| publicationDate |
2006-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006128530-A |
| titleOfInvention |
Thin film pattern forming substrate, device manufacturing method, electro-optical device, and electronic apparatus |
| abstract |
PROBLEM TO BE SOLVED: To provide a thin film pattern forming substrate, a device manufacturing method, an electro-optical device, and an electronic apparatus capable of forming a thin line-shaped fine thin film pattern accurately and stably. SOLUTION: A substrate P having a thin film pattern formed on a substrate surface, and the substrate P is connected to a liquid injection part A2 into which a functional liquid L can be injected so that the functional liquid L flows. An arranged liquid flow part A1 is provided. In these line widths of the liquid injection part A2 and the liquid flow part A1, the width d of the liquid injection part A2 is set to be not more than twice the line width b of the liquid flow part A1. [Selection] Figure 6 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009094412-A |
| priorityDate |
2004-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |