http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006118942-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2004-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_346643f4b2653f636b9da240c5193618 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_229fdfa766d6365a3be06b87b7224ae0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78ea0951a50c518406bf4bef4bd6e4b8 |
| publicationDate | 2006-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006118942-A |
| titleOfInvention | Sheet probe, method for manufacturing the same, and application thereof |
| abstract | PROBLEM TO BE SOLVED: To ensure a positional deviation between an electrode structure and an electrode to be inspected due to a temperature change even if the inspection object is a large area wafer having a diameter of 8 inches or more or a circuit device having a very small pitch of the electrode to be inspected. To provide a sheet-like probe that can be prevented, and thus can stably maintain a good electrical connection state, a manufacturing method thereof, and an application thereof. A sheet-like probe according to the present invention uses a laminate in which a resin sheet for an insulating film is integrally laminated on a metal foil for a back electrode part, and the other surface of the metal foil for a back electrode part of the laminate is provided on the other side. A plurality of openings are formed, a plurality of through holes are formed in the insulating film resin sheet corresponding to the electrode structure to be formed, and each of the insulating film resin sheets is formed by plating. It is obtained by forming a short-circuit part connected to the metal foil for the back electrode part in the through hole, forming a surface electrode part connected to the metal foil for the back electrode part, and then etching the metal foil for the back electrode part . [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009139271-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006046650-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006051845-A1 |
| priorityDate | 2004-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.