http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006109193-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d67c72636c3b504812fd37ace50d1bcd |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R23-00 |
| filingDate | 2004-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39e9cdfac91daeaba9ed54c637d08cdd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69454b8785a7ea268a2371506b6c12c2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9e314317251dbf02d137cf4591eb5c8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e612237b972e2ea7aab510d1946f9e1 |
| publicationDate | 2006-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006109193-A |
| titleOfInvention | Diaphragm of photoacoustic transducer |
| abstract | A silicon diaphragm manufactured by the MEMS method has a function suitable as a diaphragm for a photoacoustic transducer without deformation. A light emitting section (2) and a light receiving section (3) are arranged at a position facing a vibrating section (1a) of a diaphragm (1A) having a pressure receiving surface, and the light emitting section is disposed on the vibrating section (1a). (2) A photoacoustic conversion device made of silicon that radiates light and receives reflected light from the vibrating portion (1a) by the light receiving portion (3) and detects a change in the position of the vibrating portion (1a). A slit (1s) was formed in the diaphragm (1A) by the MEMS semiconductor manufacturing method. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011004129-A |
| priorityDate | 2004-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.