http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006105933-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0735 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-423 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06711 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2004-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31c63ca8e05d7d08ee1c7089d3fd6652 |
| publicationDate | 2006-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006105933-A |
| titleOfInvention | Membrane with bump, manufacturing method thereof, and wafer inspection method |
| abstract | PROBLEM TO BE SOLVED: To provide a membrane with a bump which suppresses variation in shape as much as possible and can cope with a fine electric circuit with a bump. SOLUTION: A plurality of bumps 32 integrally formed with a probe 31 whose diameter gradually decreases from one end to the other end and a large-diameter electrode 30 whose diameter is larger than the diameter of the one end of the probe 31; And a plurality of bumps 32, each of which is insulatively held at a predetermined position. The probe 31 is disposed through the insulating base 12 in the thickness direction, and the large-diameter electrode 30 is insulated from the insulating base 12. A membrane with bumps, wherein a metal film 11 is disposed between the substrate 12 and the substrate 12. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4612605-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008089439-A |
| priorityDate | 2004-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.