http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006105766-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ad2cd796f8c4dcb425ddcc68707d3444 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B15-02 |
| filingDate | 2004-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66a998052f634ff911f2e3f1fe010b70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e825b49074d670d515efa6193917a354 |
| publicationDate | 2006-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006105766-A |
| titleOfInvention | Film thickness measuring device |
| abstract | [PROBLEMS] To measure the film thickness composition of a plastic film having an inorganic layer on at least one surface continuously in a vacuum by fluorescent X-ray. The film thickness measuring device is characterized by having a mechanism for returning the fluorescent X-ray measurement path to the atmospheric pressure while maintaining the pressure higher than the portion where the measurement target is present when returning from the vacuum state to the atmospheric pressure. . [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112831767-A |
| priorityDate | 2004-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.