http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006100391-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 2004-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_346643f4b2653f636b9da240c5193618 |
| publicationDate | 2006-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006100391-A |
| titleOfInvention | Wafer inspection probe card and wafer inspection apparatus |
| abstract | PROBLEM TO BE SOLVED: To provide good electrical characteristics for each of the electrodes to be inspected in a state in which insulation necessary for adjacent electrodes to be inspected is ensured even if the electrodes to be inspected on the wafer have a small pitch and a large variation in height level. Providing a probe card and wafer inspection device that can reliably achieve secure connection. A probe card according to the present invention includes a frame plate in which a plurality of openings are formed corresponding to electrode regions in which electrodes to be inspected are arranged in all or part of an integrated circuit formed on a wafer, and a frame An anisotropic conductive connector made of a plurality of elastic anisotropic conductive films arranged to close each of the openings of the plate and supported by the opening edge, and an insulating sheet arranged on the anisotropic conductive connector A sheet-like probe that extends in the thickness direction and has a plurality of rigid electrode structures arranged according to a pattern corresponding to the pattern of the electrode to be inspected, and an anisotropic conductive elastomer arranged on the sheet-like probe It comprises a sheet. [Selection] Figure 1 |
| priorityDate | 2004-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.