http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006091806-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
filingDate | 2004-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bba022755b00dd3565ebe341cafffca0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6557f8f38fef5e970aff414b5b73cd4 |
publicationDate | 2006-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2006091806-A |
titleOfInvention | Radiation curable composition, storage method thereof, cured film forming method, pattern forming method, pattern using method, electronic component and optical waveguide |
abstract | PROBLEM TO BE SOLVED: To provide a radiation curable composition capable of obtaining a cured product excellent in pattern accuracy even when the exposure amount is relatively small, a storage method thereof, a cured film forming method and a pattern forming method. SOLUTION: The radiation curable composition of the present invention dissolves (a) component: siloxane resin, (b) component: photoacid generator or photobase generator, and (c) component: (a) component. It contains a possible solvent and component (d): a curing accelerating catalyst. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010039023-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006276598-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4725160-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010235862-A |
priorityDate | 2003-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 770.