http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006090807-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7acd9416af412b5972feb55a5e652ea2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08 |
| filingDate | 2004-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce8c0a4e9d7e9603c1ea3625545dac4e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2123b78ecf7fdc214c938251b3544c8 |
| publicationDate | 2006-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006090807-A |
| titleOfInvention | Physical quantity sensor |
| abstract | Provided is a physical quantity sensor capable of increasing sensitivity as compared with the prior art. A sensor structure 1 formed using a first silicon substrate and having an insulating film 2 on one surface side, and two sensor carbon elements CNT each disposed on the one surface side of the sensor structure 1 are made of carbon nanotubes CNT. A plurality of gauge resistors R1 and R3, two reference resistors R2 and R4, and a cover 7 formed by using a second silicon substrate and fixed to the one surface side of the sensor structure 1. The carbon nanotubes CNT are bridged between the pair of electrodes formed on the one surface of the sensor structure 1. The cover 7 is in contact with an intermediate portion of the carbon nanotubes CNT constituting the gauge resistors R1 and R3, and when the pressure is applied to the sensor structure 1, the carbon nanotubes CNT are separated from the deformation of the carbon nanotubes CNT caused by the pressure. A bias portion 7b for bending the intermediate portion is provided. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006292478-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4492416-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011064273-A1 |
| priorityDate | 2004-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.