http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006085081-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb4ee28d43b5e8d4a3c5141fa9bcfeb0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F32-08 |
| filingDate | 2004-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0698f82a780b5989637b873a055c597d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14dbaf3c8c923f95e56dc3482afd27d7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3c7acfbd485f344276629696ed584ff |
| publicationDate | 2006-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006085081-A |
| titleOfInvention | Fine pattern forming method and resist composition used therefor |
| abstract | The present invention provides a resist composition that gives a resist film excellent solubility particularly when exposed to light having a wavelength of 193 nm, and a method for forming a fine pattern having excellent contrast using the resist composition. The invention comprises (a) an acid-dissociable functional group-containing polymer, (b) a photoacid generator and (c) a dissolution inhibitor, wherein the dissolution inhibitor (c) is represented by the formula (1): [Chemical 1] (In the formula, Rf 1 and Rf 2 are the same or different, and may contain an ether bond, a C 1-10 fluorine-containing alkyl group; X is F or CF 3 ; Y 1 is dissociated by an OH group or an acid. And a resist composition which is a polymer that always contains a structural unit derived from at least one monomer (m1) selected from fluorine-containing norbornene derivatives having a moiety represented by an acid-dissociable functional group that changes to an OH group) A method of forming a fine pattern using [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8012665-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010266884-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8753792-B2 |
| priorityDate | 2004-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 102.