| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2004-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dacaa88202bf661f1511450b19627166 |
| publicationDate |
2006-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006080281-A |
| titleOfInvention |
Stage apparatus, gas bearing apparatus, exposure apparatus, and device manufacturing method |
| abstract |
PROBLEM TO BE SOLVED: To appropriately manage a floating amount of a stage and a bending amount of a stage with respect to a surface plate in a stage apparatus that supports the floating surface by gas pressure. A stage apparatus includes a stage 220 that moves on a surface plate 210, and a levitation mechanism that performs gas supply and gas suction to the stage 220 through the surface plate 210, and levitates and supports the stage 220 with respect to the surface plate 210. With. The levitation mechanism includes a plurality of gas suction paths 322 and 323 where the suction locations 322a and 323a on the surface plate 210 with respect to the stage 220 are separated from each other, and a path used for gas suction among the plurality of gas suction paths 322 and 323. And controllers 331 and 332 for selecting. [Selection] Figure 4 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10101666-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9885959-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9885872-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017010061-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10007194-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10281632-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9760014-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9341954-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013271945-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9423698-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10241417-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9891539-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4847584-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100456138-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9678437-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9678332-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10234770-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007147304-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8130365-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9857599-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8358401-B2 |
| priorityDate |
2004-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |