http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006080220-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7820eb060b017f856ba2ce4646fb12c4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q11-10 |
| filingDate | 2004-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be54717599309bbf99fd859ac50fb77b |
| publicationDate | 2006-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006080220-A |
| titleOfInvention | Dicing machine |
| abstract | 【Task】 To provide a dicing apparatus capable of preventing contamination from remaining on an uneven part of a workpiece or a specific place. [Solution] The processing unit 2 of the dicing apparatus 1 is provided with an injection unit 91 that can change the spraying direction of the cleaning liquid sprayed onto the workpiece W in any direction during the processing of the workpiece. Thereby, it becomes possible to concentrate the cleaning liquid on a specific position of the workpiece W and to effectively remove the contamination remaining on the workpiece W. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019141953-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7061890-B2 |
| priorityDate | 2004-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.