| abstract |
PROBLEM TO BE SOLVED: To provide a novel lactone compound, a lactone-containing monomer, a polymer compound using the same, a resist material, and a pattern forming method. A lactone-containing monomer represented by the general formula (1) (wherein X represents CH 2 , CH 2 CH 2 , O, S, NR 1 , R 1 to R 4 are hydrogen atoms, A halogen atom, a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, wherein some or all of the hydrogen atoms in the alkyl group may be substituted with fluorine atoms; An atomic group containing an oxygen atom, a sulfur atom, a nitrogen atom, a carbon-carbon double bond, a carbonyl group, a hydroxy group, or a carboxyl group may be included, and R 5 represents a single bond, CH 2 , or a carbonyl group. [Chemical 1] [Selection figure] None |