http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006075975-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2004-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9bfc5482c4073c109848555e93d9874 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ebb053429fba41535ee660daf9d9e86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5fec9013732000ee2c1d2d0b9a0af57 |
| publicationDate | 2006-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006075975-A |
| titleOfInvention | Polishing liquid composition |
| abstract | A polishing liquid composition having a small surface roughness after polishing, significantly reducing nanoscratches, and capable of polishing economically, and used for preparing the polishing liquid composition Provided is a method for producing a substrate comprising a polishing particle preparation liquid and a process using the polishing liquid composition. A polishing composition comprising an abrasive and water and having a pH of 0.1 to 7 that satisfies the following conditions: (1) Abrasive particles of 0.56 μm or more and less than 1 μm are contained in the polishing composition. 500,000 or less per 1 cm 3 and (2) 1 μm or more of abrasive particles are 0.001% by weight or less with respect to all abrasive particles in the polishing composition, and the substrate is polished using the polishing composition The manufacturing method of a board | substrate which has the process to do. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9080080-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012086698-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018039934-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8834589-B2 |
| priorityDate | 2004-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 67.