| abstract |
PROBLEM TO BE SOLVED: To provide a novel structure and method for monitoring the operation of an integrated circuit during operation. A method and structure for an integrated circuit comprising a first transistor and a buried carbon nanotube field effect transistor (CNT FET) proximate to the first transistor and smaller in size than the first transistor. The CNT FET is used to sense a signal including any of a temperature, voltage, current, electric field, and magnetic field signal from the first transistor. In addition, CNT FETs are used to measure stresses and strains in integrated circuits, including either mechanical stresses and strains and thermal stresses and strains. In addition, CNT FETs are used to detect defective circuits in integrated circuits. [Selection] Figure 1 |