| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-515 |
| filingDate |
2004-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7473073dadbeac4aea2675cd36898ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d68dd74c0090fab987a546dfe948ccf5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fe5efe4c42606f7a2ce7a1be4be1a19 |
| publicationDate |
2006-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006052453-A |
| titleOfInvention |
Thin film manufacturing method and thin film |
| abstract |
PROBLEM TO BE SOLVED: To obtain a thin film of good quality when forming a thin film by generating discharge plasma using a source gas containing a carbon source. A substrate is placed on at least one of counter electrodes. A discharge voltage is generated by applying a pulse voltage between the counter electrodes 4 and 5 in an atmosphere containing a source gas A containing a carbon source, and a thin film 7 is formed on the substrate 6. A positive pulse and a negative pulse are applied as the pulse voltage, and the pulse half-value width of the positive pulse and the negative pulse is 1000 nsec or less. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009102070-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014037340-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008045180-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012233257-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103849872-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009084692-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014192916-A1 |
| priorityDate |
2004-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |