http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006049678-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2004-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02861f8c7b1073217f73802b0be0916f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_137767ca87862fcca84dc796e2bff9f8 |
| publicationDate | 2006-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006049678-A |
| titleOfInvention | Variable slit apparatus, illumination apparatus, exposure apparatus, and device manufacturing method |
| abstract | PROBLEM TO BE SOLVED: To provide a variable slit device and the like capable of accurately correcting exposure unevenness. SOLUTION: In a variable slit device 100 for forming a slit-shaped illumination light EL, a tape 10 that forms one long side L of the illumination light EL and a shape of the long side L are changed by processing the tape 10. And a tape processing unit 50 to be provided. The variable slit device 100 is used as a device that adjusts the shape of the illumination light EL in an illumination device that irradiates an object with slit-shaped illumination light EL. [Selection] Figure 1 |
| priorityDate | 2004-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.